Détails sur le produit:
Conditions de paiement et expédition:
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Vitesse de pompage: | 1401L/s | lubrification: | Maglev |
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Bride: | ISO-F/CF 200 | Refroidissement: | L'eau |
nom: | Anti corrosion du frottement 5 d'axe de pompe zéro de Turbomolecular | mot-clé: | Pompe de Turbomolecular |
Surligner: | pompe turbomolecular de frottement nul,pompe turbomolecular de 5 axes,anti corrosion de pompe turbomolecular |
Water Cooling Maglev Lubrication Turbomolecular Pump CE
Technologies:
Specifications:
Model | CXF-200/1401 |
Pump Speed(l/s,Air) | 1400 |
Compression Ratio | >1×107 |
Ultimate Vacuum(Pa) | ≤2×10-6 |
Inlet Flange | DN200 ISO K(LF) |
DN200 ISO F | |
DN200 ISO CF | |
Outlet Flange | KF 40 |
Rotation Speed(rpm) | 33000 |
Run-up Time(min) | 6 |
VIB (mm) | <0.05 |
Backing Pump (L/s) | 15 |
Mounting or ientation | Any |
Cooling method | Water |
Weight(kg)(With Controller) | 51 |
Applications:
Series magnetically levitated molecular pumps are mainly applied to fields of semiconductor manufacturing, clip manufacturing, industrial plating and scientific instruments, especially to extraction of corrosive gases existing in etch, CVD, PVD and ion implantation and gases easily coagulated at normal temperature.
Personne à contacter: sales
Téléphone: +8613810212935