Détails sur le produit:
Conditions de paiement et expédition:
|
Vitesse de pompage: | 1401L/s | lubrification: | Maglev |
---|---|---|---|
Bride: | ISO-F/CF 200 | Refroidissement: | L'eau |
nom: | ce turbomolecular de pompe de lubrification de maglev de refroidissement par l'eau | mot-clé: | Pompe de Turbomolecular |
Surligner: | pompe turbomolecular de lubrification de maglev,pompe turbomolecular de refroidissement par l'eau,pompe à vide turbomolecular de la CE |
Water Cooling Maglev Lubrication Turbomolecular Pump CE
The magnetically levitated molecular pumps are the pumps of which shafting is supported by virtue of magnetic force.
Series magnetically levitated molecular pumps are vacuum generation equipment developed by KYKY for meeting application requirements for fields of modern semiconductor manufacturing, chip manufacturing, industrial plating and scientific instruments.
Technologies:
Specifications:
Model | CXF-200/1401 |
Pump Speed(l/s,Air) | 1400 |
Compression Ratio | >1×107 |
Ultimate Vacuum(Pa) | ≤2×10-6 |
Inlet Flange | DN200 ISO K(LF) |
DN200 ISO F | |
DN200 ISO CF | |
Outlet Flange | KF 40 |
Rotation Speed(rpm) | 33000 |
Run-up Time(min) | 6 |
VIB (mm) | <0.05 |
Backing Pump (L/s) | 15 |
Mounting or ientation | Any |
Cooling method | Water |
Weight(kg)(With Controller) | 51 |
Applications:
Series magnetically levitated molecular pumps are mainly applied to fields of semiconductor manufacturing, clip manufacturing, industrial plating and scientific instruments, especially to extraction of corrosive gases existing in etch, CVD, PVD and ion implantation and gases easily coagulated at normal temperature.
Personne à contacter: sales
Téléphone: +8613810212935